Sulfurization of ZnO/AlO heterostructures: material synthesis and characterizations of physical properties
碩士 === 國立中山大學 === 物理學系研究所 === 106 === This dissertation studies the main purpose of sulfurization of ZnO/AlO heterostructures. First, zinc oxide buffer layer is grown on the c-plane alumina substrate by magnetron sputtering. Then, ZnO/AlO film is deposited using an atomic layer deposition system at...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37q6v9 |