Study of longitudinal mode and shear mode by lateral fieldexcitation with ZnO based solidly mounted resonators
碩士 === 國立中山大學 === 電機工程學系研究所 === 106 === With the development of semiconductor technology and micro–nano technology in recent times, a solidly mounted resonator (SMR) has been used as a stable piezoelectric microelectromechanical system (MEMS), possessing the advantages of high resonant frequency, ma...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/5wnptm |