Electrical Properties and Analysis of ICP-CVD Graphene on Copper Interconnects

碩士 === 國立清華大學 === 電子工程研究所 === 106 === abstract hide

Bibliographic Details
Main Authors: Lin, Tsung-Ju, 林宗儒
Other Authors: Chiu, Po-Wen
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/472qet