Mechanical properties and oxidation behaviors of Zr-Si-N coatings fabricated through HIPIMS/RFMS cosputtering
碩士 === 國立臺灣海洋大學 === 材料工程研究所 === 106 === In this study, a high-power pulsed magnetron sputtering system (HIPIMS) and a radio frequency magnetron sputtering system (RFMS) were used to cosputter Zr–Si–N coatings on P-type (100) Si wafers and 420 stainless steel substrates. The effects of different nitr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/a9xjp9 |