Mechanical Properties and Oxidation Resistance of Hf–Si–N Coatings by Magnetron Sputtering
碩士 === 國立臺灣海洋大學 === 材料工程研究所 === 106 === In this study, Hf–Si–N nanocomposite coatings were prepared by reactive DC magnetron sputtering system. The first part is to prepare coatings with different Si contents. Therefore, fixed nitrogen partial pressure N2/(Ar+N2) is 0.4, and the working pressure is...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38aha7 |