Fabrication and Measurement of Micro-Ring Resonators on Silicon-on-Insulator Substrates and Silicon Substrates using Wet Oxidation
碩士 === 國立臺灣大學 === 電子工程學研究所 === 106 === In this thesis, our devices were based on theoretical analyses and numerical simulations, and then we fabricated such devices. The highlight of our thesis is using oxidation to fabricate micro-ring cavities on two different substrates. We hope to grow thicker t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/yjuu35 |