Establishment and experimental verification of simulation model of single-crystal silicon nanochannel curve machining to the preset width and depth
碩士 === 國立臺灣科技大學 === 機械工程系 === 106 === The paper proposes a simulation model for nanochannel curve machining to the preset width and depth. First of all, the paper uses a Cubic Spline curve equation acquired from the self-set control points .This study uses the obtained cubic spline curve equation to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43t72z |