Microcellular Injection Molding Process of Polishing Pad and Application in Chemical Mechanical Planarization Process
碩士 === 國立臺灣科技大學 === 機械工程系 === 106 === This study aims to develop a microcellular injection molding (MIM) process of molded pads for chemical mechanical planarization (CMP). Due to its advantages of short process time and adjustable microstructure, this study applies MIM for manufacturing CMP consuma...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6xnatj |