Fabrication and Study of MgTiTa2O8 Dielectric Thin Films
碩士 === 國立聯合大學 === 電機工程學系碩士班 === 106 === In order to understand the characteristics of MgTiTa2O8 thin films, this dissertation describes properties of MgTiTa2O8 films on n-type Si (100) substrate were deposited by radio-frequency magnetron sputtering. In addition, the physical properties, chemical co...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88sy7b |