Growth of gallium-doped zinc oxide (GZO) and its application
碩士 === 國立虎尾科技大學 === 光電工程系光電與材料科技碩士班 === 106 === In this thesis, gallium-doped zinc oxide (GZO) thin films are deposited on sapphire and silicon substrates by dual-plasma-enhanced metal-organic chemical vapor deposition (DPEMOCVD) method, the optical and electrical characteristics of GZO thin films d...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/p6bxm6 |