Optical and electrical properties and thermal stability of CrSiN films

碩士 === 國立虎尾科技大學 === 材料科學與工程系材料科學與綠色能源工程碩士班 === 106 === Transition metal nitride such as TiN, TaN, CrN coatings exhibit excellent wear resistance, high hardness, thermal stability, good conductivity and chemical stability, and is used widely in cutting tools, protective and wear-resistant coating. R...

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Bibliographic Details
Main Authors: CHEN, JUN-WEI, 陳俊瑋
Other Authors: TSAI, TING-KAN
Format: Others
Language:zh-TW
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/zax2k9