Study of Improvements in Piezoelectric Measurement System of Thin Films

碩士 === 樹德科技大學 === 電腦與通訊系碩士班 === 106 === In this paper, we discuss the development and improvement of a coupled piezoelectric film instrument. Use a stepping motor with precise positioning and high stability to replace the original servo motor to generate stress. Increase filter to eliminate noise in...

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Bibliographic Details
Main Authors: Yu-Zhe Wang, 王佑哲
Other Authors: 程達隆
Format: Others
Language:zh-TW
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/a4a4tu