Investigation of the SnO2/WO3 sensing material and its application to NOX gas sensors
碩士 === 南臺科技大學 === 電子工程系 === 106 === In this study, the WO3 sensing materials and its application to NOX gas sensors were fabricated. The WO3 thin film was deposited by RF magnetron Sputter System. In this thesis, the fabricated NOX gas sensors have many advantages such as micro-chip size, low power...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/z4p8cf |