A Study on Machine Maintenance Schedule for Semiconductor Wafer Fabrication

碩士 === 東海大學 === 工業工程與經營資訊學系 === 106 === In the context of the rapid advancement of global technology and electronic products, Artificial Intelligence (AI) and Big Data have gradually turned to be commercialized. Semiconductor technology has become one of the most important technologies in this era a...

Full description

Bibliographic Details
Main Authors: HSU,TZU-HAN, 徐子寒
Other Authors: WANG, LI-CHIH
Format: Others
Language:zh-TW
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/t6z6y9