Preparation of zirconium nitride and zirconium carbon nitride films using superimposed high power impulse magnetron sputtering system
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 106 === In this study, ZrN and ZrCN thin films were deposited using a superimposed HiPIMS–MF system(Superimposed High Power Impulse Magnetron Sputtering and Medium Frequency).The ZrN thin films coated by HiPIMS and superimposed HiPIMS–MF power supplies were grown u...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/hfhhqz |