A study on the effect of supply air plenum factor of air flow distribution in turbulence-flow clean room
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系 === 106 === In recent years, Taiwan semiconductor and optoelectronics industry has advanced to more precise and miniaturized devices. Improving the stability of environmental control has become a topic that the high-tech industry attaches great importance to. The final...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/w4u8s9 |