A study on the material performance of the diffusers for purging CDA in FOUP
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系 === 106 === FOUP (Front-Opening Unified Pod), which is an essential equipment, can hold and transport the silicon wafers. The development of new technologies has forced the study of a stricter purge as well as the higher standard and high yield rate of the production l...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/wwdhaf |