Analysis and Design of Heater for Temperature and Displacement Uniformity
碩士 === 大同大學 === 機械工程學系(所) === 106 === Temperature control in epitaxy process is a very important parameter in semiconductor process. Temperature changes during the crystallization process affect the quality of the finished product. Better quality of finished products can be achieved by effectively c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/tc6z7f |