Research on MGZO ( MZO-Ga2O3 ) Transparent Conductive Thin Films by RF Magnetron Sputtering
碩士 === 國立雲林科技大學 === 電子工程系 === 106 === In this study, MGZO thin films were deposited by radio-frequency (RF) magnetron sputtering with dual targets, gallium oxide target (Ga2O3, purity of 99.99 wt%) and magnesium zinc oxide target (M0.22Z0.78O). During the sputter deposition, the RF power of magnesiu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/z6dq28 |