A study of magnetron sputtering deposited CrN thin film and their application in crystal growth of heterogeneous structure InN thin film
碩士 === 元智大學 === 光電工程學系 === 106 === A study of magnetron sputtering deposited CrN thin film and their application in crystal growth of heterogeneous structure InN thin film Student：Yu-Hsun Chou Advisors：Dr. Fang-I Lai Submitted to Department of Photonics Engineering College of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4fszxq |