Application and Manufacture of Heterodyne Interferometer for displacement measurement
碩士 === 國立中正大學 === 光機電整合工程研究所 === 107 === This study develops a photoelectric signal processing technique and applies it to the position-measurement of linear axes which utilizes the generation of heterodyne light sources and an improved Michelson interference system. Applied to machine tool linear a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/zpr7rj |