Growth and Characterzation of ZnGa2O4 Film by Magnetron Sputter
碩士 === 大葉大學 === 醫療器材設計與材料碩士學位學程 === 107 === In this study, transparent conductive oxide Zinc gallate (ZnGa2O4) thin films were grown on Sapphire substrate by a radio frequency (RF) magnetron using a commercial ceramic target in a vacuum chamber. The structure, composition, and photoluminescence prop...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/a5k6g7 |