Average Power Handling Capability on SiON thin film and Preparation of Bionics Particle Screening Biochip
碩士 === 崑山科技大學 === 電腦與通訊研究所 === 107 === We proposed the effects of average power-handling capability (APHC) on silicon-oxy-nitride (SiON) thin film by using very high-frequency plasma-enhanced chemical vapor deposition (VHF PECVD). The proposed coplanar waveguide (CPW) thin film line is fabricated on...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/5a6vr4 |