Study on the Properties of AZO Film Improved by Al2O3 Buffer Layer and Annealing
碩士 === 龍華科技大學 === 電子工程系碩士班 === 107 === In this study, Al-doped zinc oxide (AZO) was used as a transparent conductive substrate. The effects of coating parameters on AZO thin films were investigated by RF Magnetron Sputtering and Taguchi experimental design. The experimental results show that the opt...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/p3fx73 |