Influence of Buffer Layer and Substrate Pretreatment on the Properties of ZrMoN Films
碩士 === 龍華科技大學 === 機械工程系碩士班 === 107 === In this study, a DC magnetron sputtering system was used to deposit multilayer films on nitride (MoN / ZrMoN) glass and SUS304 stainless steel substrates. The effects of reactive magnetron sputtering deposition parameters on MoN / ZrMoN rigid films were investi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/wc68ru |