Effect of Ti Interlayer on the Structure Property of the CuGa-DLC Film
碩士 === 龍華科技大學 === 機械工程系碩士班 === 107 === This study used a DC reactive sputtering system to deposit a Diamond-Like Carbon (DLC) film. Ar is a sputtering gas, methane (CH4) is a reaction gas, CuGa is a target, and a CuGa-doped DLC film is prepared on a glass and a SUS 304 stainless steel substrate. Fix...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4nazn7 |