Study on the Influence of Preparation Parameters on the Microstructure and Electrical Resistivity of Graphene
碩士 === 龍華科技大學 === 機械工程系碩士班 === 107 === Chemical vapor deposition (CVD) is a common method for preparing graphene, but the process temperature needs to be higher than 1000oC. In this study, plasma-enhanced chemical vapor deposition (PECVD) was used, and it is expected to grow graphene in a medium-low...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/g5z5ba |