Fabrication of Nitride Thin Films by Co-Sputtering of High Entropy Alloys and Tungsten
碩士 === 龍華科技大學 === 機械工程系碩士班 === 107 === This work studies the co-deposition by DC-reactive magnetron sputtering of tungsten (W) coatings over soda glass and SUS 304 stainless steel substrates. A high entropy equimolar alloy (AlCrNbSiTiV) target (diameter 2 in) and a W target (diameter 3 in) were bomb...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/fj4ax7 |