Ab initio Study of Copper Corrosion Inhibitors on Cu2O(111) Surfaces for Chemical Mechanical Planarization
碩士 === 國立中興大學 === 精密工程學系所 === 107 === On the basis of density functional theory, this study employs the first-principle calculations to investigate the adsorption energy of copper corrosion inhibitors on Cu2O(111) surfaces. The copper corrosion inhibitors discussed in this study are 1, 2, 3-Triazole...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/cgi-bin/gs32/gsweb.cgi/login?o=dnclcdr&s=id=%22107NCHU5693028%22.&searchmode=basic |