The influence of the contact electrode in scanning capacitance microscopy on the observation of p-n junctions
碩士 === 國立中興大學 === 奈米科學研究所 === 107 === S Scanning capacitance microscopy (SCM) is a characterization method that uses modulation voltage to measure the change in capacitance of semiconductor materials. SCM is also for reliability and failure analyses of semiconductor processes and can be used to obse...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
|
| Online Access: | http://ndltd.ncl.edu.tw/cgi-bin/gs32/gsweb.cgi/login?o=dnclcdr&s=id=%22107NCHU5759005%22.&searchmode=basic |