Microstructure and Mechanical Properties of sputtrerd (TiZrHf)/(AlSiB)Nx Films Deposited on the Aluminum Bronze Worm Gears

碩士 === 國立勤益科技大學 === 機械工程系 === 107 === In This study, the system was plated by reactive RF Magnetron Splash Plating TiZrHf/AlSiB multi-alloy metal and nitride films are discussed at different power, and the substrate temperature of the 400℃on the microstructure and mechanical properties of thin films...

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Bibliographic Details
Main Authors: HUANG,YIN-YAN, 黃垠諺
Other Authors: CHANG,ZUE-CHIN
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/z3rnu2