Microstructure and Mechanical Properties of sputtrerd (TiZrHf)/(AlSiB)Nx Films Deposited on the Aluminum Bronze Worm Gears
碩士 === 國立勤益科技大學 === 機械工程系 === 107 === In This study, the system was plated by reactive RF Magnetron Splash Plating TiZrHf/AlSiB multi-alloy metal and nitride films are discussed at different power, and the substrate temperature of the 400℃on the microstructure and mechanical properties of thin films...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2019
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Online Access: | http://ndltd.ncl.edu.tw/handle/z3rnu2 |