| Summary: | 碩士 === 國立勤益科技大學 === 機械工程系 === 107 === In This study, the system was plated by reactive RF Magnetron Splash Plating TiZrHf/AlSiB multi-alloy metal and nitride films are discussed at different power, and the substrate temperature of the 400℃on the microstructure and mechanical properties of thin films. maintaining a constant temperature of 400 ° C on the aluminum bronze substrate,two three-spray sputtering gun modules were deposited by a co-deposition method, Ti33.3at% Zr33.3at% Hf33.3at% ternary alloy target power is fixed 400W,selected Al33.3at% Si33.3at% B33.3at% ternary alloy target variable power to 20w as the interval, by changing the power of the plating film thickness was in the range of 1μm ± 10%, in order to achieve optimum adhesion, and finally the mechanical properties are analyzed.The results show that with the increase of power,the TiZrHf/AlSiB Metal Film is a single FCC crystalline structure, and no precipitated phase is produced. Thin film growth in the preferred direction of the (200) plane, when the splash plating power of 40W, hardness up to the maximum 34GPa , Young's coefficient is 272GPa , the crystalline state is a typical columnar crystals, and the power is increased to 80W, Crystal State is changed to amorphous structure, but the hardness is very reduced. In terms of adhesion, when the splash plating power of 40W has a better adhesion, friction coefficient is also reduced, the friction coefficient value of 0.471, The friction coefficient value of the aluminum bronze substrate without splashing multi-alloy film is 0.522, which is compared with the splash plating TiZrHf/AlSiB Nitride film has a better mechanical properties, Therefore, the application in the worm wheel and worm can reduce the friction force, so the noise and energy consumption are reduced, temperature rise phenomenon is not easy to produce, the extension of aluminum bronze worm wheel service life.
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