Improved Electrical Performance of ZnON Thin-Film Transistors with Hf0.86Si0.14O Gate Dielectric Using AZO Buffer Layer to Reduced S/D Series Resistance
碩士 === 國立成功大學 === 微電子工程研究所 === 107
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/uh6bgh |