The Study to Explore the Leakage Current and Time Dependent Dielectric Breakdown of Graphene as Dielectric Barriers of Copper Interconnects
碩士 === 國立成功大學 === 機械工程學系 === 107
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/89j2vs |