An Empirical Study of Two-Phase Multi-Objective Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab
碩士 === 國立成功大學 === 製造資訊與系統研究所 === 107
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/p5tey6 |