Impact of Line-Edge-Roughness on Interconnect RC for Advanced Technology Nodes
碩士 === 國立成功大學 === 奈米積體電路工程碩士學位學程 === 107
Main Authors: | Fu-XiangLiang, 梁富翔 |
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Other Authors: | Darsen Lu |
Format: | Others |
Language: | en_US |
Published: |
2019
|
Online Access: | http://ndltd.ncl.edu.tw/handle/tr2gt6 |
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