Study of ISFETs with APTES/Al2O3 Stacked Sensing Membranes
碩士 === 國立暨南國際大學 === 電機工程學系 === 107 === In this study, Al2O3 was deposited as sensing membranes of ISFETs and EGFETs. Self-assembly monolayers, (3-Aminopropyl)triethoxysilane, APTES, were grown on the sensing membranes as a linker between Al2O3 and biomolecule. ISFETs and EGFETs with APTES/Al2O3 stac...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/985rz3 |