Study on Vertical Indium-Gallium-Zinc Oxide Thin-Film Transistors
碩士 === 國立暨南國際大學 === 電機工程學系 === 107 === In this work, we study on the fabrication of vertical indium-gallium-zinc oxide thin-film transistors. A multi-channel vertical IGZO TFTs were designed and fabricated. The metal Mo layers was sputtered as electrode and IGZO thin film active layer was deposite...
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98x9mq |