Laser-crystallized poly-silicon-fabricated sensitive and flexible strain gauge and temperature sensor
碩士 === 國立交通大學 === 光電工程研究所 === 107 === In this thesis, the combination of plasma-deposited hydrogenated a-Si thin film, laser annealing and sandwiched laser buffer layer of SiO2/Al/SiO2 is employed to directly prepare laser-crystallized poly-Si thin film on the polyimide (PI), then fabricating flexib...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3cw34k |