Development of Differential Quartz Crystal Microbalance for in-situ Detection of Chemical Reactions
碩士 === 國立交通大學 === 材料科學與工程學系奈米科技碩博士班 === 107 === The quartz crystal microbalance (QCM) is a well-known equipment for monitoring mass deposition on thin film growth. For thin film deposition, the QCM is widely used at probing the surface reaction because of its atomic level resolution. In semiconducto...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/343k37 |