Hydrogen and Ethanol Gas Sensing Properties of SnO2 and SnO2-TiO2 Composite Films grown using Atomic Layer Deposition
碩士 === 國立交通大學 === 照明與能源光電研究所 === 107 === In this study, SnO2 films and SnO2-TiO2 composite films were fabricated by atomic layer deposition. The hydrogen and alcohol gas sensing properties of the fabricated films were investigated. It was found that the hydrogen and alcohol sensing ability of SnO2-T...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/u27v43 |