Process and Characterization of 4H-SiC UMOSFET with Thick Bottom Oxide

碩士 === 國立交通大學 === 電子研究所 === 107 === As a wide-bandgap material, SiC has the advantages of high blocking voltage and high thermal conductivity. This is suitable for the applications of high voltage power devices and occupies the market of Si-based power devices. Nevertheless, large amounts of interfa...

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Bibliographic Details
Main Authors: Yen, Hao-Hsiang, 顏皓祥
Other Authors: Tsui, Bing-Yue
Format: Others
Language:en_US
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/3fs3kh