Process Development and Device Electrical Investigation of Novel Location-Controlled Grain Technique for Monolithic 3D IC

碩士 === 國立交通大學 === 電子研究所 === 107 === Nowadays, the monolithic three-dimensional integrated circuit (Monolithic 3D-IC) is one of the key research in the development of the semiconductor industry. The distance of signal transmission can be decreased by stacking ICs. Besides, it integrates and enhances...

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Bibliographic Details
Main Authors: Chang, Yi-Jui, 張益睿
Other Authors: Chen, Kuan-Neng
Format: Others
Language:en_US
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/uqy47p