Process Development and Device Electrical Investigation of Novel Location-Controlled Grain Technique for Monolithic 3D IC
碩士 === 國立交通大學 === 電子研究所 === 107 === Nowadays, the monolithic three-dimensional integrated circuit (Monolithic 3D-IC) is one of the key research in the development of the semiconductor industry. The distance of signal transmission can be decreased by stacking ICs. Besides, it integrates and enhances...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2019
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Online Access: | http://ndltd.ncl.edu.tw/handle/uqy47p |