Study on Ethanol Gas Sensor Based on Tin Dioxide Thin Film by Oxygen Plasma Treatment
碩士 === 國立交通大學 === 電子研究所 === 107 === In this study, a novel material ethanol gas sensor was developed, which uses tin dioxide as a sensing layer to make a resistive gas sensor, and uses lithography process technology to transfer to the interdigitated electrode in the mask, by measuring the current si...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65d927 |