Study on Ethanol Gas Sensor Based on Tin Dioxide Thin Film by Oxygen Plasma Treatment

• Main Authors: Lin, Chien-Hsueh, 林建斈
• Other Authors: Chang, Kow-Ming
• Format: Others
• Language: en_US
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/65d927

碩士 === 國立交通大學 === 電子研究所 === 107 === In this study, a novel material ethanol gas sensor was developed, which uses tin dioxide as a sensing layer to make a resistive gas sensor, and uses lithography process technology to transfer to the interdigitated electrode in the mask, by measuring the current signal as an indicator of the gas response of the sensor, a gas sensor capable of detecting ethanol gas in a general environment is successfully produced with Dual E-Gun Evaporation System and used to realize the process of growing tin dioxide by physical vapor deposition (PVD) and the process of oxygen plasma treatment by atomic layer chemical vapor deposition system, due to the technology of thin film deposition or the technology of the end plasma treatment, etc., causes the surface roughness of the material and to be different from the hydrophilicity of the gas molecules. By changing the time of the oxygen plasma treatment, it is inferred from the literature that the oxygen plasma is treated with the gas of tin dioxide. Sensing mechanisms play an important role and are supported by the relationship between material analysis and electrical measurements. In this study, the optimal processing time was found by oxygen plasma treatment. The tin dioxide gas sensor by oxygen plasma treatment has good sensing performance and has a wide range of applications in life.