Design a decision framework of semiconductor equipment maintenance system
碩士 === 國立中央大學 === 工業管理研究所 === 107 === The performance of the equipment will degrade over time during usage. When the abnormality value exceeds the tolerance range, it will have serious consequences such as soaring defect rate and breakdown. Different maintenance strategies such as Prognostic and Hea...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/vbw5un |