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碩士 === 國立中央大學 === 生物醫學工程研究所 === 107 === The thesis focuses on the method of using CMOS standard processes to the application of new MEMS (Microelectromechanical Systems) sensors. Due to the MEMS sensors suffer dramatic residual stresses in processes and viscous effect in etching procedures, wafer ma...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/e79b67 |