Fabrication and Wettability of gradient porous silicon by silver metal assisted chemical etching
碩士 === 國立中央大學 === 能源工程研究所 === 107 === In recent years, nanoporous silicon plays an important role in the semiconductor industry and energy industry. Two-step metal assisted chemical etching method has the advantages of low cost and simple processes. In biomedical and microfluidic systems, the hydrop...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/v3uw9w |