Acceleration Core for the Calculation of the Randomness Features of Wafer Maps
碩士 === 國立中央大學 === 電機工程學系 === 107 === When a problem occurring on a wafer, it can be divided into two kinds of errors, random or systematic. In this study, we use previously proposed boomerang chart to classify the problem of real wafer (WM-811K). However, with the advancement of technology, wafer si...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/v7q23z |