Consistency Analysis of Randomness Test for Rotating and Flipping Wafer Maps
碩士 === 國立中央大學 === 電機工程學系 === 107 === ABSTRACT In this paper, we recalculate the characteristic parameters of wafer maps in different orientations for the classified wafer maps in previous research. We analyze the difference between new parameters and original wafer parameters, and what effect does i...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2019
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Online Access: | http://ndltd.ncl.edu.tw/handle/ee3r5w |